High Purity Single Stage Low Flow Regulator

R21SLMK-DIK-C580-11-D
R21SLQK-DKK-C580-11-DR
Title:
High Purity Single Stage Low Flow Regulator
R21SL Series

GENTEC® R21SL Series Stainless Steel Regulator is a Diaphragm-Sensed Single-Stage High Purity Regulator.

Features

• Single-Stage Configuration

• Metal-to-Metal Seal

• Body Port Size: 1/4” NPT(F)

• 2” Pressure Gauge

 

EX: R21SL

M

K -

D

I

K -

C580 -

11 -

D

Series

Body Ports

Seat

Inlet Pressure Range

Outlet Pressure Ranges

Gauge

Inlet Connections

Outlet Connections

Options

R21SL

M

K: PCTFE

D: 3000 psig

G: 0-250 psig

K: Gauge

00: 1/4” NPT(F)

00: 1/4” NPT(F)

D: Diaphragm Valve

 

Q

  

I: 0-100 psig

W: No Gauge

C320: CGA320

01: 1/4” NPT(M)

N: Needle Valve

    

K: 0-50 psig

 

C326: CGA326

10: 1/8” GENLOK

P: Panel Mount

    

L: 0-25 psig

 

C346: CGA346

11: 1/4” GENLOK

R: Relief Valve

    

Q: 30” Hg Vac-30 psig

 

C350: CGA350

Other connections available

 
    

S: 30” Hg Vac-100 psig

 

C510: CGA510

  
    

T: 30” Hg Vac-200 psig

 

C540: CGA540

  
      

C580: CGA580

  
      

C590: CGA590

  
      

Other connections available

  

 

• Maximum inlet pressure: 3000 psig

Maximum outlet pressure: 250 psig

Safety test pressure: 1.5 x Maximum inlet pressure

Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)

Inboard leakage: 2 x 10-8 atm.cc/sec He

Outboard leakage: 2 x 10-8 atm.cc/sec He inlet pressure: 1500 psig

Maximum Cv: 0.14

Weight: 2.2 lb

 

Body: 316L Stainless Steel

Bonnet: 316L Stainless Steel

Seat: PCTFE

Diaphragm: 316L Stainless Steel

Adjusting Knob: ABS Plastic

 

• Semiconductor Industry

• Research Laboratories

• Process Analyzer

• Gas Chromatography

• Petrochemical Industry

• Power Plants

 

R21 series regulator video