Ultra High Purity Single Stage Low Flow Regulator

U21SLGK-DGP-91-91-P
Title:
Ultra High Purity Single Stage Low Flow Regulator
U21SL Series

GENTEC® U21SL Series Single-Stage Stainless Steel Regulator is a hand adjustable, pressure reducing regulator designed for non-corrosive, corrosive, and toxic gas applications. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

Features

• Single-Stage Configuration 

• Metal-to-Metal Seal 

• 2” Pressure Gauge 

• Fully Internal Electropolished

• Cleaned, Assembled, and Packaged for High Purity 

  Semiconductor Application  

• 100% Helium-leak tested

 

EX: U21SL

G

K -

D

G

91 - 91 -

P

Series

Ports

Seat

Inlet Pressure Ranges 

Outlet Pressure Ranges

Gauge

Inlet / Outlet Connections

Options

U21SL

A

K: PCTFE

D: 3000 psig

F: 0-500 psig

K: psig/kPa

90: 1/4” internal female FSR

E: Ra 10 µin

 

B

 

F: 500 psig

G: 0-250 psig

P: psig/bar 

91: 1/4” swivel female FSR

P: Panel Mounting

 

G

  

I: 0-100 psig

W: No Gauge

92: 1/4” swivel male FSR

H: Hastelloy® Diaphragm

    

K: 0-50 psig

 

41: 1/4” weld stub

 
    

L: 0-25 psig

   

 

 

• Maximum inlet pressure: 500 psig (35 bar for B Port), 3000 psig (206 bar for A and G Port)

• Maximum outlet pressure: 500 psig

• Safety test pressure: 1.5 x Maximum inlet pressure

• Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)

• Inboard leakage: 2 x 10-8 atm cc/sec He

• Outboard leakage: 2 x 10-9 atm cc/sec He

• Leakage across seat: 4 x 10-8 atm cc/sec He

• Maximum Cv: 0.14

• Weight: 3.8 lb

 

• Body: 316L Stainless Steel

• Poppet: 316L Stainless Steel 

• Seat: PCTFE

Diaphragm: 316L Stainless Steel 

• Adjusting Knob: ABS Plastic

 

• Semiconductor

• Solar

• Gas Panels

• OEM