Ultra High Purity Single Stage Low Flow Regulator

U53SLGK-GLP-91-91
Title:
Ultra High Purity Single Stage Low Flow Regulator
U53SL Series

GENTEC® U53SL Series Stainless Steel Regulator is a threadless, high purity Regulator with non-tied diaphragm design. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

Features

• Single-Stage Configuration

• Metal-to-Metal Seal 

• 2” Pressure Gauge 

• Fully Internal Electropolished

• Cleaned, Assembled, and Packaged for High Purity Semiconductor Application

 

EX: U53SL

G

K -

G

L

K -

91 - 91 - 

Options

Series

Ports

Seat

Inlet Pressure Range

Outlet Pressure Range

Gauge

Inlet / Outlet Connections

P: Panel Mounting

U53SL

A

K: PCTFE

G: 300 psi

L: 0-30 psig

K: Gauge

90: 1/4” internal female FSR

H: Hastelloy® Diaphragm

 

B

   

W: No Gauge

91: 1/4” swivel female FSR

 
 

G

    

92: 1/4” swivel male FSR

 
      

41: 1/4” weld stub

 

 

• Maximum inlet pressure: 300 psig

• Maximum outlet pressure: 30 psig

• Safety test pressure: 1.5 x Maximum inlet pressure

• Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)

• Inboard leakage: 0.5 x 10-9 atm cc/sec He

• Outboard leakage: 1 x 10-9 atm cc/sec He

• Leakage across seat: 4 x 10-8 atm cc/sec He

• Maximum Cv: 0.054

• Weight: 3.8 lb

 

• Semiconductor

• Solar

• Gas Panels

• OEM