Diaphragm Valves

Diaphragm Valves
DV90 Series


• Suitable for ultra high purity applications

• End connections: Face seal fittings (FSR) and butt welded

• Internal spring-less design and metal-to-metal seal minimizes particle generation and ensures high purity in the flow passages

• Cleaned and degreased for oxygen service according to CGA G-4.1 and ASTM G93 Class C, respectively 

• Long service life

• 100% Helium leak tested


Body MaterialModelOptionsInlet/OutletInternal Finish
SL: 316LDV90(Purge port, 1/4" FSR external threaded fitting)VSM8E: 7 µin
  None: No purge portVSF8 
  U: with inlet purge portTW8 
  D: with outlet purge portTW12 
  B: with both inlet and outlet purge port  

Please refer to the chart above for the available specifications for the desired connection type.


Inlet & Outlet Connections


8 = 1/2"

12 = 3/4"

VSM: Face seal swivel male (FSR fittings)8
VSF: Face seal swivel female (FSR fittings)8
TW: Butt welded8, 12


• Maximum operating pressure: 300 psi (20.7 bar)

• Temperature range: -40˚F~150˚F (-40˚C~ 65˚C)

•  Cv: 2.8


• Body: 316L stainless steel

• Seat: PCTFE

• Diaphragm: Elgiloy®


• Standard Ra: 20 µin (BA); Optional: 7 µin (EP)